Figure 5 Scheme of the suggested mechanism for low-temperature oxidation of the H-terminated Si NWs. Conclusions In conclusion, the growth kinetics of the suboxides and silicon dioxide is highly dependent to temperature and time. At lower temperatures, oxidation is first controlled by backbond oxidation. After full oxidation of the backbonds, Si-H bond rupture dominates the process kinetics. At higher temperatures, suboxide

nucleation sites (known as oxide growth sites) control the early stages of oxidation. After complete formation of the very first oxide monolayers, further oxidation is self-limited as the oxidant’s diffusion through the oxide layers is impaired. These findings suggest a perspective on more efficient methods to stabilize Si NWs against oxidation over the long term. Acknowledgments KS wishes to thank University of Erlangen-Nuremberg GSK1210151A clinical trial and the Elite Advanced Materials and GSK2118436 chemical structure Processes (MAP) graduate program for the MS thesis scholarship. MYB gratefully learn more acknowledges the Max-Planck Society for the Post-Doctoral fellowship. SHC acknowledges the financial support by the FP7264 EU project LCAOS (nr. 258868, HEALTH priority) and the BMBF project (MNI priority) NAWION. References 1. Rurali R: Colloquium: structural, electronic, and transport properties of silicon nanowires.

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